The participants from NKUA belong to the Semiconductor and Microsystems Lab. at the Department of Physics. NKUA group has a long broad knowledge in the field of MEMS switch reliability, specifically the effect of RF-MEMS capacitive switches dielectric film charging. NKUA group has participated in several EU projects, among which AMICOM, NANOCOM, NANOTEC, ESA on mitigation of dielectric charging and design of MEMS redundancy switch, with Georgia Institute of Technology within the frame of DARPA project as well as USA, European bilateral and National collaborations The research work will assist the completion of a PhD thesis and the results be disseminated through presentation at high ranked international conferences and peer review journals covering the same topics area.